Patent · US Active

Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes

US7617736B2 · kind B2 · utility

10Cited by
30References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 30, 2008
Grant dateNov 17, 2009
Priority date—
Expiry dateJun 30, 2028

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01Q60/38
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.