Stage apparatus
US7619330B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 19, 2007 |
| Grant date | Nov 17, 2009 |
| Priority date | — |
| Expiry date | Jan 21, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K7/118
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A stage apparatus includes a movable stage; a magnetic unit including a first permanent magnet that is provided on the stage and magnetized in a direction perpendicular to a moving direction of the stage and at least one pair of second permanent magnets that are magnetized such that opposing portions of the first and second permanent magnets have the same pole. The magnetic unit applies a force to the stage in the moving direction thereof by placing the first permanent magnet between the pair of second permanent magnets. An actuator is configured to drive the second permanent magnets in the direction of magnetization. The force applied to the stage is varied by driving the actuator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.