Micro-patterned SiO2/TiO2 films through photo and chemical reactions
US7622239B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 10, 2006 |
| Grant date | Nov 24, 2009 |
| Priority date | — |
| Expiry date | May 7, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/405
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for making a patterned SiO2 films over TiO2 (Si02/Ti02) under ambient atmospheric conditions, including room temperature, through photo and chemical reactions. The method is simple, convenient and can be performed in a short period of time, typically less than two hours. The patterned TiO2 film is fabricated through photo-irradiation of a photosensitive organic-titanium film using a mask. Silica particles are generated from silicate solution by adjusting pH values to 10 to 8 with hydrochloric acid. The pre-deposited TiO2 film has a strong attraction for the SiO2 particles, leading to the instant formation of SiO2 film over the TiO2 film. The silica films are also amino-silylated with 3-aminopropyltriethoxysilane toward applications such as patternable, location-specific silica-based separation and purification.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.