Patent · US Active

Method for making an electromechanical component on a plane substrate

US7625772B2 · kind B2 · utility

5Cited by

5References

8Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Fabrice Casset · Tencin, FR
Cédric Durand · St-Estève, FR
Pascal Ancey · Castres, FR

Key dates

Filing date	Sep 27, 2007
Grant date	Dec 1, 2009
Priority date	—
Expiry date	May 22, 2028

Classification

Technology area (CPC H)Electricity
CPC primaryH03H2009/02496
WIPO fieldBasic communication processes
WIPO sectorElectrical engineering

Abstract

Method for making an electromechanical component on a plane substrate and comprising at least one structure vibrating in the plane of the substrate and actuation electrodes. The method comprises at least the following steps in sequence:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.