Piezoelectric resonator with optimised motional capacitances
US7626318B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 18, 2008 |
| Grant date | Dec 1, 2009 |
| Priority date | — |
| Expiry date | Jul 18, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/215
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
The tuning fork resonator (1) includes a base (4) from which first and second parallel vibrating arms (2, 3) extend, carrying a set of excitation electrodes (5, 6) for vibrating the arms at a fundamental frequency. Grooves (7, 8) are formed on at least one of the top or bottom surfaces of each of said arms. The vibrating arms have a generally tapered shape, and are extended by an enlarged flipper shaped portion (9, 10) which forms the free end of each arm. The groove (7, 8) is extended in the direction of the free end of an arm to beyond the start of the flipper (9, 10) so as to increase said first motional capacitance of the resonator for the fundamental frequency, to decrease said second motional capacitance of the resonator for the partial frequency and to ensure better distribution of mechanical stress along the vibrating arms and to increase shock resistance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.