Inertial sensor with disturbing current reduced by reducing the width and the spacing of tracks in critical zones
US7628070B2 · kind B2 · utility
1Cited by
2References
6Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 30, 2006 |
| Grant date | Dec 8, 2009 |
| Priority date | — |
| Expiry date | Oct 20, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/09
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The inertial sensor comprises a piezoelectric plate having a vibrator member defined therein that carries excitation electrodes connected to an excitation circuit comprising conductor tracks carried by the piezoelectric plate, the excitation circuit including a disturbing circuit portion in which two conductor tracks extend on either side of a midplane and present a width less than 50 μm, and preferably equal to 10 μm, and are spaced apart by a distance of less than 100 μm, and preferably equal to 40 μm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.