Optical devices and related systems and methods

US7629572B2 · kind B2 · utility

Assignee

• Carl Zeiss Laser Optics GmbH · DE

Inventors

• Vitaliy Shklover · Heidenheim, DE
• Holger Kierey · Aalen, DE
• Holger Muenz · Aalen, DE
• Michel Le Maire · Oberkochen, DE
• Bernhard Weigl · Seattle, US

Key dates

• Filing date: May 5, 2006
• Grant date: Dec 8, 2009
• Expiry date: Jul 18, 2027

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B13/08
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The disclosure relates to a light beam intensity non-uniformity correction device that includes an optical element having a light entrance face with an antireflective property. According to the invention the antireflective property is locally amended in order to enhance light beam intensity uniformity. The disclosure further relates to a method for amending intensity distribution of a light beam in an optical system having one or more optical elements, where the method includes: a) assembling the optical system with the one or more optical elements arranged in predetermined positions, b) measuring intensity distribution, c) calculating locally required increase or decrease in absorption and/or reflection of one of the optical elements to amend measured intensity distribution into a predetermined intensity distribution, d) removing the optical element from the optical system, e) locally amending absorption and/or reflection of the one of the optical elements according to the calculation, f) installing the optical element in the predetermined position in the optical system.