Patent · US Active

Probe card assembly and test probes therein

US7629803B1 · kind B1 · utility

2Cited by
8References
19Claims
0Family size

Assignee

Inventor

Key dates

Filing dateAug 28, 2008
Grant dateDec 8, 2009
Priority date
Expiry dateAug 28, 2028

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R1/06772
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Disclosed are a probe card assembly and test probes used therein. The probe card assembly includes a main body, a probe base provided at a center of the main body, and a plurality of test probes connecting the main body and the probe base. Therein, each of the test probes has a tip extending out from the probe base for contacting and testing a wafer. The test probes include at least one power probe, at least one grounding probe and a plurality of signal probes, wherein each of the test probes has a middle section between the main body and contains therein a core that is wrapped by an insulation layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.