Inspecting apparatus for glass substrate
US7630071B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 28, 2007 |
| Grant date | Dec 8, 2009 |
| Priority date | — |
| Expiry date | Dec 28, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/1309
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspecting apparatus for a glass substrate detects blurs of a green color filter layer, a blue color filter layer, a column spacer layer, a pixel layer of a thin film transistor, or the like, which are generally hardly inspected. The inspecting apparatus for a glass substrate includes: a first illumination unit supplying reflective light to a surface of the substrate to inspect whether the surface of the substrate is defective or not; a second illumination unit supplying transmissive light from a rear side of the substrate to inspect whether the interior of the substrate is defective or not; a latticed rear plate provided on a rear surface of the substrate; and a driving interferometer system generating a phase difference of light by driving such that a driving guide is moved along the rear plate or the rear plate itself is moved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.