Non-contacting electrostatically driven MEMS device
US7630120B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 26, 2007 |
| Grant date | Dec 8, 2009 |
| Priority date | — |
| Expiry date | Oct 26, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A microelectromechanical device has a movable first electrode and stationary second and third electrodes oriented parallel with the substrate. The first electrode is separated from the substrate and includes a first hinge oriented parallel to the substrate, with spaced apart extensions extending from opposing sides of the first electrode. The second and third electrodes are fixedly formed on the substrate adjacent to the opposing sides of the first electrode and have spaced apart extensions interspersed with the spaced apart extensions of the first electrode. The first electrode can move substantially parallel to the surface of the substrate such that the extensions of one side of the first electrode substantially overlap the extensions of the second electrode in a first state and the extensions of the other side of the first electrode substantially overlaps the extensions of the third electrode in a second state. A second hinge has one or more first posts fixedly coupled to the substrate and one or more second posts coupled to the first electrode, such that movement of the first electrode causes a twisting of the first and second hinges.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.