Use of anti-reflective seed layers for the fabrication of perpendicular thin film heads
US7631417B2 · kind B2 · utility
6Cited by
3References
22Claims
0Family size
Assignee
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Key dates
| Filing date | Nov 10, 2006 |
| Grant date | Dec 15, 2009 |
| Priority date | — |
| Expiry date | Aug 15, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49052
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Methods and structures for the fabrication of perpendicular thin film heads are disclosed. Prior to the deposition of shield structures, seed layers having anti-reflective properties are utilized, eliminating the need to deposit, then remove, traditional inorganic anti-reflection coatings prior to shield plating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.