Composite stamper for imprint lithography
US7632087B2 · kind B2 · utility
73Cited by
20References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 19, 2003 |
| Grant date | Dec 15, 2009 |
| Priority date | — |
| Expiry date | Feb 23, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29C33/3842
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A stamper having a patterned layer composed of a hard material and a compressible material back plane layer. The back plane layer may be composed of an elastomer. The stamper may be used to imprint an embossable layer disposed above a substrate for the production of a magnetic recording disk.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.