Microstructure, microreactor, micro heat exchanger and method for fabricating microstructure
US7632470B2 · kind B2 · utility
18Cited by
8References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 18, 2005 |
| Grant date | Dec 15, 2009 |
| Priority date | — |
| Expiry date | Oct 13, 2026 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF28F2260/02
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A microstructure includes first and second plates. The first plate defines a recess. The second plate is bonded to the first plate to block an opening of the recess to thereby form a closed vacuum space or a closed space filled with inert gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.