Manufacturing method for organic electronic element and manufacturing apparatus therefor
US7632704B2 · kind B2 · utility
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4Claims
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Key dates
| Filing date | Apr 14, 2005 |
| Grant date | Dec 15, 2009 |
| Priority date | — |
| Expiry date | Aug 27, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K85/649
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Provided are a method of effectively manufacturing an organic EL element with high quality and an apparatus therefor. A surface to be processed of a substrate in an upper electrode forming step is held downward, and the surface to be processed of the substrate in a passivation layer forming step is held upward.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.