Patent · US Active

High-performance field effect transistors with self-assembled nanodielectrics

US7633130B2 · kind B2 · utility

1Cited by
3References
25Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 19, 2007
Grant dateDec 15, 2009
Priority date
Expiry dateMar 19, 2027

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/02126
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Field effect transistor devices comprising III-V semiconductors and organic gate dielectric materials, such dielectric materials as can afford flexibility in device design and fabrication.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.