MEMS resonator having an inner element and an outer element that flex
US7633360B2 · kind B2 · utility
6Cited by
18References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 27, 2006 |
| Grant date | Dec 15, 2009 |
| Priority date | — |
| Expiry date | Apr 13, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02503
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A MEMS resonator has an outer element having an inner surface, the inner surface defining an area and a inner element coupled to the outer element and disposed within the area. The MEMS resonator also has an actuation electrode, in communication with the outer element, for generating electrostatic signals that cause the inner element to flex in a periodic manner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.