Method and apparatus for producing UV laser from all-solid-state system
US7633979B2 · kind B2 · utility
12Cited by
6References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 12, 2008 |
| Grant date | Dec 15, 2009 |
| Priority date | — |
| Expiry date | Feb 12, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/0622
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An all-solid-state laser system produces coherent DUV radiation through a third or fourth harmonic generation. The fundamental wavelength is generated by a slave laser optically pumped by one or more light source(s) of high density array(s) and is stabilized by injecting optical seeds whose wavelength is rapidly swept to cover the fundamental wavelength. The pump effects are enhanced by a pump chamber that recycles unabsorbed pump light. The present invention enables DUV pulses with a width shorter than 1 ns and a repetition rate higher than 100 kHz. The output DUV wavelength is adjustable by selecting an appropriate seeder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.