Plasma generating electrode, plasma generation device, and exhaust gas purifying device
US7635824B2 · kind B2 · utility
18Cited by
0References
8Claims
0Family size
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Key dates
| Filing date | Jun 18, 2004 |
| Grant date | Dec 22, 2009 |
| Priority date | — |
| Expiry date | Aug 3, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A plasma generating electrode of the invention present includes at least a pair of electrodes 5, at least one electrode 5a of the pair of electrodes 5 including a plate-like ceramic body 2 as a dielectric and a conductive film 3 disposed inside the ceramic plate 2 and having a plurality of through-holes 4 formed through the conductive film 3 in its thickness direction, the through-holes having a cross-sectional shape including an arc shape along a plane perpendicular to the thickness direction. The plasma generating electrode can generate uniform and stable plasma at low power consumption.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.