Piezoelectric resonator and piezoelectric thin-film filter
US7636027B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 12, 2007 |
| Grant date | Dec 22, 2009 |
| Priority date | — |
| Expiry date | Mar 6, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/173
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A piezoelectric resonator and a piezoelectric thin-film filter including the piezoelectric resonator. The piezoelectric resonator includes a piezoelectric layer disposed between a pair of conductive layers to form a vibrating region. Outer edges of the vibrating region each have a waveform. The vibrating region includes a peripheral portion extending along the outer edges of the planar shape and having a relatively small thickness; and a central portion extending inside the peripheral portion and having a relatively large thickness. The piezoelectric resonator is thus capable of suppressing long-wavelength spurious modes and short-wavelength spurious modes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.