Beam assembly method for large area array multi-beam DUT probe cards

US7637006B2 · kind B2 · utility

Assignee

• SV Probe Pte. Ltd. · SG

Inventors

• Bahadir Tunaboylu · Chandler, US
• Horst Clauberg · Whitemarsh, US
• John McGlory · Chandler, US
• Anh-Tai Thai Nguyen · Gilbert, US

Key dates

• Filing date: Feb 27, 2007
• Grant date: Dec 29, 2009
• Expiry date: Oct 28, 2027

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49222
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for fabricating beams for a probe card includes dividing a large beam panel into smaller sub-panels before attaching the beams to corresponding posts on a substrate. Each sub-panel may have a sufficient number of beams to test several devices under test. The beam sub-panels may be aligned to the space transformer using alignment fiducials on the beam sub-panels that correspond to opposing alignment features formed in the space transformer or other substrate. Special tie-bars may be formed between: (1) rows, for example, of beams and the frame/frame splines (i.e., quadrant tie-bars); and (2) adjacent beams within any such rows on the beam panel (i.e., beam tie-bars). The approach may also include the use of tip tie-bars and/or tail tie-bars.