Patent · US Active

Integrated displacement sensors for probe microscopy and force spectroscopy

US7637149B2 · kind B2 · utility

57Cited by

6References

8Claims

0Family size

Assignee

Georgia Tech Research Corporation · US

Inventors

F. Levent Degertekin · Decatur, US
Abidin Güçlü Onaran · Austin, US

Key dates

Filing date	Jun 29, 2006
Grant date	Dec 29, 2009
Priority date	—
Expiry date	Apr 30, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG01Q60/38
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible mechanical structure and the detection surface, wherein the flexible mechanical structure is configured to deflect upon exposure to an external force, thereby changing the first distance.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.