Liquid metal droplet generator
US7637403B2 · kind B2 · utility
2Cited by
7References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 25, 2005 |
| Grant date | Dec 29, 2009 |
| Priority date | — |
| Expiry date | Oct 25, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/30107
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Small, high velocity liquid metal droplets are produced for applications that require the accurate and remote placement of small quantities of a metal. The magnetic pressure of current flowing through liquid metal is used to force small quantities of liquid metal through an orifice. Examples of applications are to feed metal fuel into plasma extreme ultraviolet sources, and to place solder bumps on an integrated circuit prior to the attachment of connections.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.