Deposition system using sealed replenishment container
US7638168B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 10, 2005 |
| Grant date | Dec 29, 2009 |
| Priority date | — |
| Expiry date | Dec 19, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/164
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for vaporizing particulate material and depositing it onto a surface to form a layer, includes providing a supply of particulate material in a replenishment container, the replenishment container having a sealed interface fitting; mounting the replenishment container to a supply hopper defining at least one feed opening, and breaking the seal at the interface fitting; transferring particulate material from the replenishment container to the supply hopper; and transferring such particulate material through the feed opening along a feeding path to a vaporization zone where at least a component portion of the particulate material is vaporized and delivered to the surface to form the layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.