Patent · US Active

Method and device for detecting arcs

US7640120B2 · kind B2 · utility

8Cited by

31References

29Claims

0Family size

Assignee

HUETTINGER Elektronik GmbH + Co. KG · DE

Inventors

Sven Axenbeck · Neuenbürg, DE
Markus Bannwarth · Glückstadt, DE
Martin Steuber · Buggingen, DE
Peter Wiedemuth · Herbolzheim, DE
Lothar Wolf · Sasbach, DE

Key dates

Filing date	Dec 19, 2006
Grant date	Dec 29, 2009
Priority date	—
Expiry date	Feb 19, 2028

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/0206
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An arc detection means for detecting arcs in a plasma process includes at least one comparator to which an evaluation signal such as an output signal or an internal signal of an AC generator relating to the output signal and a reference value are supplied. The comparator is connected to a logic component that generates a signal for an arc suppression device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.