Patent · US Active

Method and apparatus for cooling non-native instrument in automatic test equipment

US7642802B2 · kind B2 · utility

1Cited by
6References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 28, 2007
Grant dateJan 5, 2010
Priority date
Expiry dateApr 1, 2028

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An adapter frame is configured to receive a non-native test instrument module and is further configured for coupling within a test head of automatic semiconductor device test equipment. The adapter frame includes interfaces for operatively connecting the test instrument module to the test head using the existing slots of the test head. Interfaces may include mechanical interfaces, such as liquid cooling interfaces and other suitable interfaces. Additional software and/or hardware components may be included on the adapter frame to integrate the non-native test instrument module into the existing test equipment.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.