Partially coherent illumination for inverse scattering full-field interferometric synthetic aperture microscopy
US7643155B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 2, 2008 |
| Grant date | Jan 5, 2010 |
| Priority date | — |
| Expiry date | Jun 2, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/58
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and apparatus for three-dimensional imaging of a sample. A source is provided of a beam of light characterized by partial spatial coherence. The beam is focused onto a sample and scattered light from the sample is superposed with a reference beam derived from the source onto a focal plane detector array to provide an interference signal. A forward scattering model is derived relating measurement data to structure of an object to allow solutions of an inverse scattering problem, based upon the interference signal so that a three-dimensional structure of the same may be inferred. The partial spatial coherence of the source, which may be fixed or variable, may advantageously provide for rejection of multiple scattering artifacts and thus improve image quality.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.