Manufacturing method for imprinting stamper
US7644496B2 · kind B2 · utility
1Cited by
8References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 10, 2007 |
| Grant date | Jan 12, 2010 |
| Priority date | — |
| Expiry date | Mar 28, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49162
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A manufacturing method for imprinting stamper is disclosed. The manufacturing method includes forming a plurality of concave patterns on an insulation layer, forming a stamper by filling copper in the concave patterns, separating the stamper from the insulation layer, providing roughness on the surface of the stamper, can separate the stamper from the insulation layer, can prevent the deformation of the stamper and can manufacture pluralities of stampers repeatedly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.