Micro-electro-mechanical pressure sensor
US7644622B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Feb 28, 2008 |
| Grant date | Jan 12, 2010 |
| Priority date | — |
| Expiry date | Jul 20, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0019
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present micro-electro-mechanical pressure sensor includes a substrate, a dielectric isolation layer, at least two electrodes, and a vibrating membrane. The substrate includes an acoustic cavity. The dielectric isolation layer is formed on the substrate, and the dielectric isolation layer includes a through hole corresponding to the acoustic cavity. The at least two electrodes are separately formed on the dielectric isolation layer. The vibrating membrane covers the through hole, and the vibrating membrane includes at least one carbon nanotube structure with two opposite ends. The two opposite ends of the carbon nanotube are respectively connected to at least a given one of the at least two electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.