Microscale gas discharge ion detector
US7645996B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 27, 2006 |
| Grant date | Jan 12, 2010 |
| Priority date | — |
| Expiry date | Feb 15, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microscale planar device for detecting particles under high pressure with high sensitivity. The device may have an anode and cathode with an insulator situated between them. The insulator may have a number of holes, cavities or channels between the anode and cathode. There may be conductive rings at the perimeters of openings of the channels on the anode side of the insulator. These rings may be a part of the anode. An ion may be attracted into one of the channels where it interacts with a gas to result in an avalanche breakdown. The breakdown may be detected by instrumentation connected to the anode and cathode. The lateral and/or longitudinal dimensions of the channels may be such that the device may operate as a detector with ambient air as a gas under its pressure of about one atmosphere.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.