Slit coater with a standby unit for a nozzle and a coating method using the same
US7647884B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 19, 2005 |
| Grant date | Jan 19, 2010 |
| Priority date | — |
| Expiry date | Aug 31, 2027 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05C5/0254
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A slit coater with a standby unit for a nozzle and a coating method using the same prevents environmental pollution by solvent steam and simultaneously maintains the slit nozzle in an optimum state. When in standby and not performing a coating application, the slit nozzle is kept in a standby unit having a solvent atmosphere therein. The slit coater includes: a table on which an object to be processed is positioned; a slit nozzle for applying a coating solution onto a surface of the object; and a standby unit into which the slit nozzle is loaded when on standby, and having a shutter at the opening thereof to maintain an inner space in a substantially hermetically sealed solvent atmosphere. The atmosphere in the standby unit is configured to prevent hardening of the coating solution in the slit nozzle and thereby maintain the slit nozzle in the optimum state for providing coating applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.