Wave front sensing method and apparatus
US7649160B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 17, 2006 |
| Grant date | Jan 19, 2010 |
| Priority date | — |
| Expiry date | May 5, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03H2001/0883
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A new way of mixing instrumental and digital means is described for the general field of wave front sensing. The present invention describes the use, the definition and the utility of digital operators, called digital wave front operators (DWFO) or digital lenses (DL), specifically designed for the digital processing of wave fronts defined in amplitude and phase. DWFO are of particular interest for correcting undesired wave front deformations induced by instrumental defects or experimental errors. DWFO may be defined using a mathematical model, e.g. a polynomial function, which involves coefficients. The present invention describes automated and semi-automated procedures for calibrating or adjusting the values of these coefficients. These procedures are based on the fitting of mathematical models on reference data extracted from specific regions of a wave front called reference areas, which are characterized by the fact that specimen contributions are a priori known in reference areas. For example, reference areas can be defined in regions where flat surfaces of a specimen produce a constant phase function. The present invention describes also how DWFO can be defined by extracting …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.