Method and apparatus for controlling curvatures of microlenses and micromirrors
US7649670B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 7, 2005 |
| Grant date | Jan 19, 2010 |
| Priority date | — |
| Expiry date | Jun 21, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B3/0006
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention includes a method and apparatus for controlling curvatures of light directing devices. The apparatus includes a first substrate portion having formed therein a plurality of cavities, and a substantially flexible membrane disposed over the cavities for forming a respective plurality of light directing mechanisms, the light directing mechanisms disposed over the cavities. The respective curvatures of the light directing mechanisms are set using a pressure difference across each of the membrane portions disposed over the cavities. The respective curvatures of the light directing mechanisms may be controllably adjusted during operation of the light directing mechanisms.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.