Process for the observation of at least one sample region with a light raster microscope with linear sampling

US7649683B2 · kind B2 · utility

Assignee

• Carl Zeiss Micromanaging GmbH · DE

Inventors

• Ralf Engelmann · Jena, DE
• Joerg-Michael Funk · Arth, CH
• Joerg Steinert · Jena, DE
• Bernhard Zimmermann · Großenhain, DE
• Stefan Wilhelm · Unterhaching, DE
• Joerg Engel · Triebes, DE
• Ulrich Meisel · Jena, DE

Key dates

• Filing date: Oct 19, 2004
• Grant date: Jan 19, 2010
• Expiry date: Oct 25, 2025

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S359/90
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Process for observing at least one sample region with a light raster microscope by a relative movement between the illumination light and sample via a first scanner along at least one scanning axis essentially perpendicular to the illumination axis wherein several illuminated sample points lie on a line and are detected simultaneously with a spatially resolving detector. At an angle to the plane of the relative movement, a second scanner is moved and an image acquisition takes place by coupling the movement of the first and second scanners and a three-dimensional sampling movement being done by the illumination of the sample. The second scanner is coupled to the movement of the first scanner such that straight and/or curved lines and/or plane and/or curved surfaces are scanned which are extended along at least one scanning direction of the first scanner as well as along the scanning direction of the second scanner.