Method and apparatus for localizing production errors in a semiconductor component part
US7651874B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 21, 2006 |
| Grant date | Jan 26, 2010 |
| Priority date | — |
| Expiry date | Sep 26, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a method and to an arrangement for localizing production errors in a semiconductor component part by generating excess charge carriers in the semiconductor component part and by determining the electric potential in said part. In order to be able to localize production errors with simple measures and without damaging the semiconductor component part, it is suggested that the semiconductor component part be stimulated to become luminescent and that the locally resolved luminescence intensity distribution be determined in order to determine the locally resolved distribution of the electric potential in the semiconductor component part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.