Nano data writing and reading apparatus using cantilever structure and fabrication method thereof
US7652972B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 19, 2005 |
| Grant date | Jan 26, 2010 |
| Priority date | — |
| Expiry date | Aug 14, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49083
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A nano data writing and reading apparatus using a cantilever structure includes a cantilever formed by patterning a deposition material deposited on a sacrificial substrate, a probe formed at a front end portion of one surface of the cantilever and formed simultaneously with the cantilever as the deposition material is filled in a probe groove pattern formed on the sacrificial substrate when the deposition material is deposited on the sacrificial substrate, a heater formed of polycrystalline silicon at the cantilever, for heating the probe, a data sensing unit formed at the cantilever and sensing data written on media, a signal connection pad connected to the data sensing unit and formed at the cantilever to provide an electrical connection with an external signal line, a signal transfer circuit unit connected to the signal connection pad, for controlling writing and reading of data on and from the media, and a bonding unit allowing the cantilever to be supported at the signal transfer circuit unit and providing a passage for an electrical connection between the signal connection pad and the signal transfer circuit unit. Accordingly, the cantilever and the probe can be precisely fo…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.