Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed
US7654137B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2005 |
| Grant date | Feb 2, 2010 |
| Priority date | — |
| Expiry date | Dec 8, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides a corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed.More specifically, the corrosion-resistant metal made sensor for fluid is equipped with a corrosion-resistant metal substrate, a mass flow rate sensor part comprising a corrosion resistant metal substrate, a thin film forming a temperature sensor and a heater mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and a pressure sensor part comprising a thin film forming a strain sensor element mounted on the back face side of the fluid contacting surface of the corrosion-resistant metal substrate, and the sensor is so constituted that the mass flow rate and pressure of the fluid are measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.