Vibratory gyrosensor having a vibration element provided with terminals
US7654139B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 23, 2006 |
| Grant date | Feb 2, 2010 |
| Priority date | — |
| Expiry date | Mar 13, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5656
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
To improve characteristics by achieving size reduction and high Q value with a simple structure. A vibratory gyrosensor 1 according to the present invention includes a supporting substrate 2, which has a circuit element mounted thereon and a wiring pattern having a plurality of lands 4 disposed thereon; and a vibration element 20 mounted on a surface 2-1 of the supporting substrate. The vibration element 20 includes a base portion 22 having a mounting surface 22-2 provided with a plurality of terminals 25 that are connected to the lands; and a vibrator portion 23 extending integrally from a side of the base portion 22 in a cantilever manner and having a substrate-facing surface which is flush with the mounting surface of the base portion 22, the substrate-facing surface being provided with a first electrode layer 27, a piezoelectric layer 28 stacked on the first electrode layer, and a second electrode layer 29, 30 stacked on the piezoelectric layer. The vibration element 20 is mounted on the supporting substrate 2 by joining the terminals 25 to the lands 4 with metallic projections 26 disposed therebetween.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.