Substrate carrying method thereof
US7654786B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 29, 2005 |
| Grant date | Feb 2, 2010 |
| Priority date | — |
| Expiry date | Dec 6, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/677
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A shuttle is disclosed in which a large-sized substrate is prevented from sagging under its weight or from slipping. The shuttle includes a body, support pins supporting sides of the substrate, and shuttle arms provided to sides of the body to rotate in an axial direction and move in a right-to-left direction. The support pins are coupled with the shuttle arms, respectively. A pair of center supports support center parts of sides of the substrate not supported by the support pins. The center supports are movably coupled to a main frame in a front-to-rear direction. A driving unit moves and rotates the shuttle arms in the right-to-left direction. The driving unit moves the center supports in the front-to-rear direction using the main frame. A vacuum instrument assembly is provided to each of the support pins to securely hold the substrate by a vacuum force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.