Spherical aberration corrected electrostatic lens, input lens, electron spectrometer, photoemission electron microscope and measuring system
US7655923B2 · kind B2 · utility
1Cited by
4References
10Claims
0Family size
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Key dates
| Filing date | Nov 9, 2004 |
| Grant date | Feb 2, 2010 |
| Priority date | — |
| Expiry date | May 19, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2522
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mesh (M) having an ellipsoid shape or a shape close to the ellipsoid shape is attached to an electrode (EL1) among electrodes (EL1 to ELn). Voltages of the later-stage electrodes (EL2 to ELn) are appropriately set. With this arrangement, a local negative spherical aberration generated by the mesh (M) is cancelled out with a positive spherical aberration. This optimizes an electric field distribution. As a result, this realizes an electrostatic lens whose acceptance angle is extended to about ±60°.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.