Method and device for the contactless excitation of torsional vibrations in a one-sidedly clamped-in spring cantilever of an atomic force microscope

US7657947B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Michael Reinstadtler · Pocking, DE
• Volker Scherer · Kehl, DE
• Walter Arnold · Saarburg, DE

Key dates

• Filing date: May 7, 2004
• Grant date: Feb 2, 2010
• Expiry date: Jun 26, 2025

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B82Y35/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for exciting free torsional vibrations a spring cantilever, which is clamped in on one side and has a longitudinal extension, of an atomic force microscope (AFM) is disclosed. The invention provides