SiOx:Si composite articles and methods of making same
US7658822B2 · kind B2 · utility
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Key dates
| Filing date | Aug 11, 2005 |
| Grant date | Feb 9, 2010 |
| Priority date | — |
| Expiry date | Aug 11, 2025 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2235/77
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Article are made from silicon oxide and electrically conductive doped silicon materials that are joined in a protective environment to yield a composite SiOx:Si material that exhibits the properties of SiOx and yet is electrically conductive due to the presence of the Si. Articles from such composite materials find many uses, such as for targets for DC and/or AC sputtering processes to produce silicon oxide thin films for touch-screen application, barrier thin films in LCD displays and optical thin films used in a wide variety of applications.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.