Patent · US Active

Apparatus having a layer of material configured as a reservoir having an interior capable of holding a liquid

US7659591B2 · kind B2 · utility

0Cited by
1References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 27, 2008
Grant dateFeb 9, 2010
Priority date
Expiry dateAug 27, 2028

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81B2201/038
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

The present invention provides an apparatus. The apparatus, in one embodiment, includes an actuator located over a substrate, a movable feature located over and coupled to the actuator, and a layer of material located above the actuator and movable feature and not constituting part of a beam/spring associated with the movable feature, the layer of material configured as a reservoir having an interior capable of holding a liquid, the movable feature being exposed to the interior.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.