Vacuum chamber AC/DC probe
US7659742B1 · kind B1 · utility
4Cited by
4References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 17, 2007 |
| Grant date | Feb 9, 2010 |
| Priority date | — |
| Expiry date | Aug 17, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06705
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Features of non-vacuum AC/DC probe systems are combined with features of the DC vacuum chamber testers to provide an AC/DC probe system that can be used in a vacuum environment, such as a SEM vacuum chamber. Features of the DC vacuum chamber tester are modified to include new op-amp circuitry that provides the AC/DC testing functionality of the non-vacuum chamber systems, resulting in an AC/DC probe system that can be used in a vacuum environment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.