Patent · US Active

Devices and methods for inspecting optical elements with a view to contamination

US7659976B2 · kind B2 · utility

1Cited by

5References

29Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Julian Kaller · Oberkochen, DE
Herbert Fink · Emmelshausen, DE
Christoph Zaczek · Heubach, DE
Wolfgang Rupp · Wertheim, DE

Key dates

Filing date	Dec 7, 2006
Grant date	Feb 9, 2010
Priority date	—
Expiry date	Jan 27, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/9583
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Described is an examination system (1) for locating contamination (2) on an optical element (4) installed in an optical system (5), which examination system (1) comprises: a spatially resolving detector (6); imaging optics (7) that magnify in particular at a magnification of between 2 times and 100 times, for magnified imaging of a surface sub-region (3a) of the optical element (4) on the spatially resolving detector (6); as well as a movement mechanism (12), in particular a motorized movement mechanism (12), for displacing the imaging optics (7) together with the detector (6) relative to the surface (3) of the optical element (4) such that any desired surface sub-region of the surface (3) can be imaged at magnification.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.