Patent · US Active

Evaporator

US7661276B1 · kind B1 · utility

1Cited by
4References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 12, 2006
Grant dateFeb 16, 2010
Priority date
Expiry dateAug 16, 2027

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldThermal processes and apparatus
  • WIPO sectorMechanical engineering

Abstract

An evaporator (102) provides a compact design in which thermal energy can be removed from a DUT (108) in an efficient manner. The evaporator (102) can include a cover (306) which includes both input and output apertures for providing refrigerant into and out of the evaporator (102). An orifice plate (304) is located between the cover (306) and a heat exchanger (302). The heat exchanger (302) includes a plurality of pillars which help increase the surface area of the heat exchanger (302). The orifice plate (304) includes an aperture (310) which forms a nozzle which sprays refrigerant onto the heat exchanger in order to remove the heat away from the heat exchanger (302).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.