Evaporator
US7661276B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 12, 2006 |
| Grant date | Feb 16, 2010 |
| Priority date | — |
| Expiry date | Aug 16, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
An evaporator (102) provides a compact design in which thermal energy can be removed from a DUT (108) in an efficient manner. The evaporator (102) can include a cover (306) which includes both input and output apertures for providing refrigerant into and out of the evaporator (102). An orifice plate (304) is located between the cover (306) and a heat exchanger (302). The heat exchanger (302) includes a plurality of pillars which help increase the surface area of the heat exchanger (302). The orifice plate (304) includes an aperture (310) which forms a nozzle which sprays refrigerant onto the heat exchanger in order to remove the heat away from the heat exchanger (302).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.