Micromachined artificial haircell

US7661319B2 · kind B2 · utility

Assignee

• The Board of Trustees of the University of Illinois · US

Inventors

• Chang Liu · Champaign, US
• Jonathan Engel · Minneapolis, US
• Nannan Chen · Beijing, CN
• Jack Chen · Richmond, CA

Key dates

• Filing date: Jun 1, 2007
• Grant date: Feb 16, 2010
• Expiry date: Jun 1, 2027

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/0118
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.