Device for spin-coating substrates
US7661385B2 · kind B2 · utility
2Cited by
6References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 19, 2006 |
| Grant date | Feb 16, 2010 |
| Priority date | — |
| Expiry date | Oct 19, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67126
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A device for spin-coating substrates with liquid media is provided, including a rotatable substrate plate for horizontally supporting a substrate, and a covering unit for covering the substrate during a distribution operation of the liquid medium by means of rotation of the substrate holder. The substrate holder is adapted to be joined tightly to the covering unit, so that passage holes arranged circumferentially on the substrate holder so that an internal coating space, defined by the covering unit and the substrate holder, is in fluid communication with the environment outside the internal space.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.