Patent · US Active

Method and system for measuring physical parameters with a piezoelectric bimorph cantilever in a gaseous or liquid environment

US7663295B2 · kind B2 · utility

1Cited by

8References

12Claims

0Family size

Assignee

IMEC · BE

Inventors

Vincent Mortet · Kessel-Lo, BE
Rainer Petersen · Wolfsburg, DE

Key dates

Filing date	Dec 14, 2006
Grant date	Feb 16, 2010
Priority date	—
Expiry date	Jul 4, 2027

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T436/143333
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A piezoelectric bimorph cantilever is used for determining physical parameters in a gaseous or liquid environment. The sensor works as a driven and damped oscillator. Contrary to common cantilever sensor systems, the piezoelectric film of the bimorph cantilever acts as both a sensor and an actuator. Using at least two resonance mode of the bimorph cantilever, at least two physical parameters can be measured simultaneously in a gas or a liquid. An optimized piezoelectric cantilever and a method to produce the cantilever are also described.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.