Patent · US Active

Cavity enhanced photo acoustic gas sensor

US7663756B2 · kind B2 · utility

27Cited by
88References
20Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJul 21, 2008
Grant dateFeb 16, 2010
Priority date
Expiry dateJul 21, 2028

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2021/1704
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Devices and method for photo acoustically detecting a gas are disclosed. In one illustrative embodiment, a gas sensor includes an optical cavity defined by one or more optical segments separating at least two mirrors. A photo acoustic cell, configured to receive a gas from the surrounding environment, is provided at least partially within one or more of the optical segments of the optical cavity. One of the at least two mirrors is configured to couple electromagnetic radiation into the optical cavity and to interact with the gas. A detector is acoustically coupled to the photo acoustic cell to detect absorption of the electromagnetic radiation by the gas.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.