Transfer chamber for flat display device manufacturing apparatus
US7665946B2 · kind B2 · utility
1Cited by
25References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 1, 2004 |
| Grant date | Feb 23, 2010 |
| Priority date | — |
| Expiry date | Jul 18, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A transfer chamber for a flat display device manufacturing apparatus is provided. The transfer chamber may combine functions of a transfer chamber and a load-lock chamber. A robot may be provided aside from a center of the transfer chamber, and a buffer may be provided so as to avoid interference with the robot. An aligner may adjust a position of a substrate mounted on the buffer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.